JPS6345773Y2 - - Google Patents

Info

Publication number
JPS6345773Y2
JPS6345773Y2 JP19444981U JP19444981U JPS6345773Y2 JP S6345773 Y2 JPS6345773 Y2 JP S6345773Y2 JP 19444981 U JP19444981 U JP 19444981U JP 19444981 U JP19444981 U JP 19444981U JP S6345773 Y2 JPS6345773 Y2 JP S6345773Y2
Authority
JP
Japan
Prior art keywords
outer shell
shell container
plate
gas
partition
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP19444981U
Other languages
English (en)
Japanese (ja)
Other versions
JPS5897917U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19444981U priority Critical patent/JPS5897917U/ja
Publication of JPS5897917U publication Critical patent/JPS5897917U/ja
Application granted granted Critical
Publication of JPS6345773Y2 publication Critical patent/JPS6345773Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Gas-Insulated Switchgears (AREA)
JP19444981U 1981-12-23 1981-12-23 ガス絶縁開閉装置 Granted JPS5897917U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19444981U JPS5897917U (ja) 1981-12-23 1981-12-23 ガス絶縁開閉装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19444981U JPS5897917U (ja) 1981-12-23 1981-12-23 ガス絶縁開閉装置

Publications (2)

Publication Number Publication Date
JPS5897917U JPS5897917U (ja) 1983-07-04
JPS6345773Y2 true JPS6345773Y2 (en]) 1988-11-29

Family

ID=30107766

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19444981U Granted JPS5897917U (ja) 1981-12-23 1981-12-23 ガス絶縁開閉装置

Country Status (1)

Country Link
JP (1) JPS5897917U (en])

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2003065424A2 (en) 2002-01-25 2003-08-07 Applied Materials, Inc. Apparatus for cyclical deposition of thin films
US6911391B2 (en) 2002-01-26 2005-06-28 Applied Materials, Inc. Integration of titanium and titanium nitride layers
US6998014B2 (en) 2002-01-26 2006-02-14 Applied Materials, Inc. Apparatus and method for plasma assisted deposition
KR101369355B1 (ko) 2006-07-31 2014-03-04 어플라이드 머티어리얼스, 인코포레이티드 에피택셜 층 형성 동안에 형태를 제어하는 방법

Also Published As

Publication number Publication date
JPS5897917U (ja) 1983-07-04

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